Browsing by author "Masami, Ikota"
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SEM Inspection of Nanowire Devices: Contact inspection, Resistance and Capacitance Measurement and Buckling Evaluation
Ohashi, Takeyoshi; Hasumi, Kazuhisa; Masami, Ikota; Lorusso, Gian; Mertens, Hans; Witters, Liesbeth; Horiguchi, Naoto (2019)