Browsing by author "Seitzinger, Bernard"
Now showing items 1-1 of 1
-
Electrical characterization of capacitors with AVD- deposited hafnium silicates as high-k gate dielectric
Van Elshocht, Sven; Weber, U.; Conard, Thierry; Kaushik, Vidya; Houssa, Michel; Hyun, Sangjin; Seitzinger, Bernard; Lehnen, Peer; Schuhmacher, M.; Lindner, J.; Caymax, Matty; De Gendt, Stefan; Heyns, Marc (2005)