Publication:

Electrical characterization of capacitors with AVD- deposited hafnium silicates as high-k gate dielectric

Date

2005
Journal article
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Author(s)

Van Elshocht, Sven  
;
Weber, U.
;
Conard, Thierry  
;
Kaushik, Vidya
;
Houssa, Michel  
;
Hyun, Sangjin
;
Seitzinger, Bernard
;
Lehnen, Peer
;
Schuhmacher, M.
;
Lindner, J.
;
Caymax, Matty  
;
De Gendt, Stefan  
;
Heyns, Marc  

Journal

Journal of the Electrochemical Society

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