Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
Electrical characterization of capacitors with AVD- deposited hafnium silicates as high-k gate dielectric
Publication:
Electrical characterization of capacitors with AVD- deposited hafnium silicates as high-k gate dielectric
Date
2005
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Van Elshocht, Sven
;
Weber, U.
;
Conard, Thierry
;
Kaushik, Vidya
;
Houssa, Michel
;
Hyun, Sangjin
;
Seitzinger, Bernard
;
Lehnen, Peer
;
Schuhmacher, M.
;
Lindner, J.
;
Caymax, Matty
;
De Gendt, Stefan
;
Heyns, Marc
Journal
Journal of the Electrochemical Society
Abstract
Description
Metrics
Views
1900
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1900
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations