Electrical characterization of capacitors with AVD- deposited hafnium silicates as high-k gate dielectric

Van Elshocht, Sven; Weber, U.; Conard, Thierry; Kaushik, Vidya; Houssa, Michel; Hyun, Sangjin; Seitzinger, Bernard; Lehnen, Peer; Schuhmacher, M.; Lindner, J.; Caymax, Matty; De Gendt, Stefan; Heyns, Marc

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Electrical characterization of capacitors with AVD- deposited hafnium silicates as high-k gate dielectric

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2005

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Journal of the Electrochemical Society

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Electrical characterization of capacitors with AVD- deposited hafnium silicates as high-k gate dielectric

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