Browsing by author "Ahmed, Khaled"

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Further optimization of plasma nitridation of ultra-thin oxides for 65 nm node MOSFETS

Kraus, Philip; Chua, Tai Chen; Rothschild, Aude; Cubaynes, Florence; Veloso, Anabela; Mertens, Sofie; Date, Lucien; Bauer, Thomas; Ahmed, Khaled; Nouri, Faran; Schreutelkamp, Rob; Schaekers, Marc (2004)