Browsing by author "Pavelka,"
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Impact of laser anneal thermal budget on the quality of thin SiGe channels with a high Ge content
Rosseel, Erik; Hikavyy, Andriy; Everaert, Jean-Luc; Witters, Liesbeth; Mitard, Jerome; Hoffmann, Thomas Y.; Vandervorst, Wilfried; Pap, A.; Pavelka, (2010-10)