Browsing by author "Dirksen, Peter"
Now showing items 1-3 of 3
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Characterization of a projection lens using the extended Nijboer-Zernike approach
Dirksen, Peter; Braat, Joseph; De Bisschop, Peter; Janssen, Augustus J.E.M.; Juffermans, Casper; Williams, Alvina (2002) -
Development of a contact edge roughness measurement methodology and its sources in 193nm patterning
Vandeweyer, Tom; Maerhoudt,; de Marneffe, Jean-Francois; Dirksen, Peter (2003) -
Novel aberration monitor for optical lithography
Dirksen, Peter; Juffermans, Casper; Pellens, R. J.; Maenhoudt, Mireille; De Bisschop, Peter (1999)