Browsing by author "Malainou, Antonia"
Now showing items 1-2 of 2
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Cavity wafer bonding after deep silicon etch
Malainou, Antonia; Majeed, Bivragh; Sabuncuoglu Tezcan, Deniz (2017) -
Development of copper/dielectric hybrid fusion bonding with cavity for CMOS compatible wafer level hermetic packaging
Malainou, Antonia; Sabuncuoglu Tezcan, Deniz (2019)