Browsing by author "Butera, Geni"

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Degradation and failure analysis of copper and tungsten contacts under high fluence stress

Kauerauf, Thomas; Butera, Geni; Croes, Kristof; Demuynck, Steven; Wilson, Chris; Roussel, Philippe; Drijbooms, Chris; Bender, Hugo; Lofrano, Melina; Vandevelde, Bart; Tokei, Zsolt; Groeseneken, Guido (2010)
On the reliability of Cu contacts for the 32nm technology node and beyond

Kauerauf, Thomas; Demuynck, Steven; Butera, Geni; Bogan, Justin; Tokei, Zsolt; Groeseneken, Guido (2009)