Degradation and failure analysis of copper and tungsten contacts under high fluence stress

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Authors
Kauerauf, Thomas; Butera, Geni; Croes, Kristof; Demuynck, Steven; Wilson, Chris; Roussel, Philippe; Drijbooms, Chris; Bender, Hugo; Lofrano, Melina; Vandevelde, Bart; Tokei, Zsolt; Groeseneken, Guido
Conference
48th Annual IEEE International Reliability Physics Symposium - IRPS
Title
Degradation and failure analysis of copper and tungsten contacts under high fluence stress
Publication type
Proceedings paper
Embargo date
9999-12-31
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