Publication:

Degradation and failure analysis of copper and tungsten contacts under high fluence stress

Date

2010
Proceedings Paper
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Author(s)

Kauerauf, Thomas
;
Butera, Geni
;
Croes, Kristof  
;
Demuynck, Steven  
;
Wilson, Chris  
;
Roussel, Philippe  
;
Drijbooms, Chris  
;
Bender, Hugo  
;
Lofrano, Melina  
;
Vandevelde, Bart  
;
Tokei, Zsolt  
;
Groeseneken, Guido  

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