Browsing by author "Mayur, A.J."

Now showing items 1-2 of 2

Silicide yield improvement with NiPtSi formation by laser anneal for advanced low power platform CMOS technology

Ortolland, Claude; Rosseel, Erik; Horiguchi, Naoto; Kerner, Christoph; Mertens, Sofie; Kittl, Jorge; Verleysen, Eveline; Bender, Hugo; Vandervorst, Wilfried; Lauwers, Anne; Absil, Philippe; Biesemans, Serge; Mathukrishnan, S.; Srinivasan, S.; Mayur, A.J.; Schreutelkamp, Rob; Hoffmann, Thomas Y. (2009)
Ultralow-resistivity CMOS contact scheme with pre-contact amorphization plus Ti (germano-)silicidation

Yu, Hao; Schaekers, Marc; Hikavyy, Andriy; Rosseel, Erik; Peter, Antony; Hollar, K.; Khaja, Fareen; Aderhold, W.; Date, Lucien; Mayur, A.J.; Lee, J.G.; Shin, Keo Myoung; Douhard, Bastien; Chew, Soon Aik; Demuynck, Steven; Kubicek, Stefan; Kim, Daeyong; Mocuta, Anda; Barla, Kathy; Horiguchi, Naoto; Collaert, Nadine; Thean, Aaron; De Meyer, Kristin (2016)