Publication:

Ultralow-resistivity CMOS contact scheme with pre-contact amorphization plus Ti (germano-)silicidation

Date

2016
Proceedings Paper
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Author(s)

Yu, Hao  
;
Schaekers, Marc  
;
Hikavyy, Andriy  
;
Rosseel, Erik  
;
Peter, Antony  
;
Hollar, K.
;
Khaja, Fareen
;
Aderhold, W.
;
Date, Lucien  
;
Mayur, A.J.
;
Lee, J.G.
;
Shin, Keo Myoung
;
Douhard, Bastien  
;
Chew, Soon Aik
;
Demuynck, Steven  
;
Kubicek, Stefan  
;
Kim, Daeyong
;
Mocuta, Anda
;
Barla, Kathy  
;
Horiguchi, Naoto  
;
Collaert, Nadine  
;
Thean, Aaron  
;
De Meyer, Kristin  

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