Publication:

Ultralow-resistivity CMOS contact scheme with pre-contact amorphization plus Ti (germano-)silicidation

Date

2016
Proceedings Paper
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

33572.pdf 661.45 KB

Author(s)

Yu, Hao  
;
Schaekers, Marc  
;
Hikavyy, Andriy  
;
Rosseel, Erik  
;
Peter, Antony  
;
Hollar, K.
;
Khaja, Fareen
;
Aderhold, W.
;
Date, Lucien  
;
Mayur, A.J.
;
Lee, J.G.
;
Shin, Keo Myoung
;
Douhard, Bastien  
;
Chew, Soon Aik
;
Demuynck, Steven  
;
Kubicek, Stefan  
;
Kim, Daeyong
;
Mocuta, Anda
;
Barla, Kathy  
;
Horiguchi, Naoto  
;
Collaert, Nadine  
;
Thean, Aaron  
;
De Meyer, Kristin  

Journal

Abstract

Description

Metrics

Downloads

1 since deposited on 2021-10-23
Acq. date: 2025-10-23

Views

1988 since deposited on 2021-10-23
Acq. date: 2025-10-23

Citations

Metrics

Downloads

1 since deposited on 2021-10-23
Acq. date: 2025-10-23

Views

1988 since deposited on 2021-10-23
Acq. date: 2025-10-23

Citations