Publication:
Ultralow-resistivity CMOS contact scheme with pre-contact amorphization plus Ti (germano-)silicidation
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Downloads
1 since deposited on 2021-10-23
Acq. date: 2026-05-16
Views
1997 since deposited on 2021-10-23
1last month
Acq. date: 2026-05-16
Citations
Statistics
Downloads
1 since deposited on 2021-10-23
Acq. date: 2026-05-16
Views
1997 since deposited on 2021-10-23
1last month
Acq. date: 2026-05-16
Citations