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Ultralow-resistivity CMOS contact scheme with pre-contact amorphization plus Ti (germano-)silicidation
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Acq. date: 2026-03-17
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Acq. date: 2026-03-17
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1 since deposited on 2021-10-23
Acq. date: 2026-03-17
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1994 since deposited on 2021-10-23
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Acq. date: 2026-03-17
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