Browsing by author "Ansar, Sheik"
Now showing items 1-3 of 3
-
An improved CMP process for integration of high mobility channel materials
Teugels, Lieve; Ong, Patrick; Ansar, Sheik; Delande, Tinne; Bhonsle, Rithu; Siebert, Max; Garcia Romero, Ivan; Struyf, Herbert; Leunissen, Leonardus (2016) -
CMP on SiGe materials - linking chemical and physical properties to design low defect selective slurries
Ong, Patrick; Siebert, Max; Huang, Kevin; Teugels, Lieve; Ansar, Sheik; Leunissen, Peter (2014) -
Ge CMP process development
Ong, Patrick; Leunissen, Peter; Ansar, Sheik; Gillot, Christophe; Lan, Yongqing; Noller, Bastian; Li, Yuzhuo (2012)