Browsing by author "Haynes, Rose Marie"
Now showing items 1-1 of 1
-
EUV photoresist reference metrology using TEM tomography
Biedrzycki, Mark; Adiga, Umesh; Barnum, Andrew; Moussa, Alain; Arjavac, Jason; Haynes, Rose Marie; Charley, Anne-Laure; Leray, Philippe; Batuk, Dmitry (2020)