Browsing by author "Lu, Xiaowan"

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Si-passivated Ge nMOS gate stack with low DIT and dipole-induced superior PBTI reliability using 3D-compatible ALD caps and high-pressure anneal

Arimura, Hiroaki; Cott, Daire; Loo, Roger; Vanherle, Wendy; Xie, Qi; Tang, Fu; Jiang, Xiaoqiang; Franco, Jacopo; Sioncke, Sonja; Ragnarsson, Lars-Ake; Chiu, Eddie; Lu, Xiaowan; Geypen, Jef; Bender, Hugo; Maes, Jan; Givens, Michael; Sibaja-Hernandez, Arturo; Wostyn, Kurt; Boccardi, Guillaume; Mitard, Jerome; Collaert, Nadine; Mocuta, Dan (2016)