Browsing by author "Deduytse, Davy"
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ALD of ZrO2, TiO2 and ZrTiO4 thin films from heteroleptic precursors
Schaekers, Marc; Opsomer, Karl; Rampelberg, Geert; Deduytse, Davy; Detavernier, Christophe; Blasco, Nicolas; Zauner, Andy (2010)