Publication:
ALD of ZrO2, TiO2 and ZrTiO4 thin films from heteroleptic precursors
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1975 since deposited on 2021-10-18
2last month
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Acq. date: 2026-08-16
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Statistics
Views
1975 since deposited on 2021-10-18
2last month
1last week
Acq. date: 2026-08-16
Citations