Browsing by author "Leca, V."

Now showing items 1-1 of 1

    • New low-stress PECVD Poly-SiGe layers for MEMS 

      Rusu, Cristina; Sedky, S.; Parmentier, Brigitte; Verbist, Agnes; Richard, Olivier; Brijs, Bert; Geenen, Luc; Witvrouw, Ann; Lärmer, F.; Fischer, F.; Kronmüller, S.; Leca, V.; Otter, B. (2003)