Browsing by author "Keunig, Wytze"
Now showing items 1-1 of 1
-
Thermal and plasma enhanced atomic layer deposition of Al2O3 on GaAs substrates
Sioncke, Sonja; Caymax, Matty; Conard, Thierry; Delabie, Annelies; Franquet, Alexis; Heyns, Marc; Meuris, Marc; Urbanczyk, Adam; Van Hemmen, J.L.; Keunig, Wytze; Kessels, W.M.M. (2008)