Browsing by author "Keldermans, J."

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Photoresist characterization and wet strip after low-k dry etch

Claes, Martine; Le, Quoc Toan; Keldermans, J.; Kesters, Els; Lux, Marcel; Franquet, Alexis; Vereecke, Guy; Mertens, Paul; Frank, Martin M.; Carleer, R.; Adriaensens, P.; Vanderzande, Dirk (2008)