Browsing by author "Arstila, K."
Now showing items 1-2 of 2
-
Characterization of high and low dielectrica using low Energy Time of Flight Elastic Recoil Detection
Brijs, Bert; Sajavaara, T.; Giangrandi, Simone; Arstila, K. (2005) -
The analysis of a thin SiO2/SixN1-x/SiO2 stack, a comparative study of low energy ERD with XPS, low energy SIMS, HRBS, HR-ERD
Brijs, Bert; Giangrandi, Simone; Arstila, K.; Bergmaier, A.; Kimura, K.; Conard, Thierry; Vandervorst, Wilfried; Vantomme, Andre (2005)