Authors

Brijs, Bert; Giangrandi, Simone; Arstila, K.; Bergmaier, A.; Kimura, K.; Conard, Thierry; Vandervorst, Wilfried; Vantomme, Andre

Conference

17th International Conference on Ion Beam Analysis

Title

The analysis of a thin SiO2/SixN1-x/SiO2 stack, a comparative study of low energy ERD with XPS, low energy SIMS, HRBS, HR-ERD

Publication type

Oral presentation