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The analysis of a thin SiO2/SixN1-x/SiO2 stack, a comparative study of low energy ERD with XPS, low energy SIMS, HRBS, HR-ERD
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1989 since deposited on 2021-10-16
Acq. date: 2025-10-23
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Views
1989 since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations