Browsing by author "Montgomery, P.K."

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Resist reflow for 193-nm low-K1 lithography contacts

Montgomery, P.K.; Lucas, K.; Strozewski, K.J.; Zavyalova, L.; Grozev, Grozdan; Reybrouck, Mario; Tzviatkov, P.; Maenhoudt, Mireille (2003)