Browsing by author "Hughes, Carolyn"
Now showing items 1-3 of 3
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Assessment of quadrupole mass spectrometry as an in situ HDP-CVD process diagnostic technique
Van Hoeymissen, Jan; Hughes, Carolyn; Heyns, Marc (1999) -
In situ HDP-CVD process diagnostics based on quadrupole mass spectrometry
Hughes, Carolyn; Van Hoeymissen, Jan; Heyns, Marc (1999) -
In situ HDP-CVD process monitoring based on quadrupole mass spectrometry
Hughes, Carolyn; Van Hoeymissen, Jan; Heyns, Marc (2000)