Browsing by author "Ben Yaala, Marwa"
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Crystal orientation dependent anisotropic dry silicon etching
Trompoukis, Christos; El Daif, Ounsi; Verdonck, Patrick; Niesen, Bjoern; Ben Yaala, Marwa; Depauw, Valerie; Gordon, Ivan; Poortmans, Jef (2013)