Browsing by author "Winkelmeier, Stephanie"
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Line edge roughness: characterization, modeling and impact on device behavior
Croon, Jeroen; Storms, Greet; Winkelmeier, Stephanie; Pollentier, Ivan; Ercken, Monique; Decoutere, Stefaan; Sansen, Willy; Maes, Herman (2002) -
Metrology method for the correlation of line edge roughness for different resists before and after etch
Winkelmeier, Stephanie; Sarstedt, Margit; Ercken, Monique; Goethals, Mieke; Ronse, Kurt (2000) -
Metrology method for the correlation of line edge roughness for different resists before and after etch
Winkelmeier, Stephanie; Sarstedt, Margit; Ercken, Monique; Goethals, Mieke; Ronse, Kurt (2001)