Browsing by author "Hurd, Trace Q."

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Selective isotropic etching of Group IV semiconductors to enable gate all around device architectures

Kal, Subhadeep; Pereira, Cheryl; Oniki, Yusuke; Holsteyns, Frank; Smith, Jeffrey; Mosden, Aelan; Kumar, Kaushik; Biolsi, Peter; Hurd, Trace Q. (2018)
Si trim applications: benefits and challenges

Kal, Subhadeep; Oniki, Yusuke; Pereira, Cheryl; Holsteyns, Frank; Chanemougame, Daniel; Mosden, Aelan; Kumar, Kaushik; Biolsi, Peter; Hurd, Trace Q. (2019)