Browsing by author "Jonas, Alain M."
Now showing items 1-2 of 2
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Filling of 80nm trenches using a novel copper oxide reduction and reflow approach
Carbonell, Laure; Palmans, Roger; Travaly, Youssef; Tokei, Zsolt; Jonas, Alain M.; Brongersma, Sywert; Maex, Karen (2005) -
Interface characterization of nanoscale laminate structures on dense dielectric substrates by X-ray reflectivity
Travaly, Youssef; Schuhmacher, Jorg; Martin Hoyas, Ana; Van Hove, Marleen; Maex, Karen; Abell, Thomas; Sutcliffe, Victor; Jonas, Alain M. (2005-04)