Publication:
Filling of 80nm trenches using a novel copper oxide reduction and reflow approach
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1902 since deposited on 2021-10-16
14last month
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Acq. date: 2026-10-08
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Statistics
Views
1902 since deposited on 2021-10-16
14last month
4last week
Acq. date: 2026-10-08
Citations