Browsing by author "Pireaux, Jean-Jaques"
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Sealing of porous low-k dielectric materials: UV-O3 oxidised CVD silicon oxycarbide materials
Whelan, Caroline; Cecchet, Francesca; Le, Quoc Toan; Satta, Alessandra; Pireaux, Jean-Jaques; Maex, Karen; Rudolf, Petra (2002)