Authors

Whelan, Caroline; Cecchet, Francesca; Le, Quoc Toan; Satta, Alessandra; Pireaux, Jean-Jaques; Maex, Karen; Rudolf, Petra

Issue

3

Journal

Physicalia Magazine

Volume

24

Title

Sealing of porous low-k dielectric materials: UV-O3 oxidised CVD silicon oxycarbide materials

Publication type

Journal article