Publication:
Sealing of porous low-k dielectric materials: UV-O3 oxidised CVD silicon oxycarbide materials
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1990 since deposited on 2021-10-15
2last month
Acq. date: 2026-01-08
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Metrics
Views
1990 since deposited on 2021-10-15
2last month
Acq. date: 2026-01-08
Citations