Browsing by author "Zimmermann, R."

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    • New approach to optical proximity correction 

      Rosenbusch, A.; Hourd, A.; Juffermans, C.; Kirsch, H.; Lalanne, F.; Maurer, W.; Romeo, C.; Ronse, Kurt; Schiavone, P.; Simecek, M.; Toublan, O.; Watson, J.; Ziegler, W.; Zimmermann, R. (1998)