Browsing by author "Armour, D. G."

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High resolution medium energy ion scattering (MEIS) analysis for the quantitative depth profiling of ultra thin high-k layers

Reading, M. A.; van den Berg, J. A.; Zalm, P. C.; Armour, D. G.; Bailey, P.; Noakes, T. C. Q.; Parisini, A.; Conard, Thierry; De Gendt, Stefan (2010)