Authors

Reading, M. A.; van den Berg, J. A.; Zalm, P. C.; Armour, D. G.; Bailey, P.; Noakes, T. C. Q.; Parisini, A.; Conard, Thierry; De Gendt, Stefan

ISSN

1071-1023

Issue

1

Journal

Journal of Vacuum Science and Technology B

Volume

28

Title

High resolution medium energy ion scattering (MEIS) analysis for the quantitative depth profiling of ultra thin high-k layers

Publication type

Journal article

Embargo date

9999-12-31