Publication:

High resolution medium energy ion scattering (MEIS) analysis for the quantitative depth profiling of ultra thin high-k layers

Date

2010
Journal article
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dc.contributor.authorReading, M. A.
dc.contributor.authorvan den Berg, J. A.
dc.contributor.authorZalm, P. C.
dc.contributor.authorArmour, D. G.
dc.contributor.authorBailey, P.
dc.contributor.authorNoakes, T. C. Q.
dc.contributor.authorParisini, A.
dc.contributor.authorConard, Thierry
dc.contributor.authorDe Gendt, Stefan
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-18T20:46:19Z
dc.date.available2021-10-18T20:46:19Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17874
dc.source.beginpageC1C65
dc.source.endpageC1C70
dc.source.issue1
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.volume28
dc.title

High resolution medium energy ion scattering (MEIS) analysis for the quantitative depth profiling of ultra thin high-k layers

dc.typeJournal article
dspace.entity.typePublication
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