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High resolution medium energy ion scattering (MEIS) analysis for the quantitative depth profiling of ultra thin high-k layers
Publication:
High resolution medium energy ion scattering (MEIS) analysis for the quantitative depth profiling of ultra thin high-k layers
Date
2010
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Reading, M. A.
;
van den Berg, J. A.
;
Zalm, P. C.
;
Armour, D. G.
;
Bailey, P.
;
Noakes, T. C. Q.
;
Parisini, A.
;
Conard, Thierry
;
De Gendt, Stefan
Journal
Journal of Vacuum Science and Technology B
Abstract
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1925
since deposited on 2021-10-18
Acq. date: 2025-10-25
Citations
Metrics
Views
1925
since deposited on 2021-10-18
Acq. date: 2025-10-25
Citations