Browsing by author "Finders, J."
Now showing items 1-2 of 2
-
Experimental verification of a model based decomposition method for double dipole lithography
Eurlings, M.; Hsu, S.D.; Hendrickx, Eric; op 't Root, W.; Laidig, T.L.; Chiou, T.B.; Chen, A.; Chen, F.; Vandenberghe, Geert; Finders, J. (2004) -
Extending EUV lithography for DRAM applications
Rispens, Gijsbert; Van Lare, C.; Oorschot, D.; Hoefnagels, R.; Liu, S.; Van Mierlo, W.; Zuurbier, N.; Dardani, Z.; Wang, Z.; Maslow, M.; Finders, J.; Fallica, Roberto; Frommhold, Andreas; Hendrickx, Eric; Niroomand, A.; Light, S. (2020)