Publication:

Extending EUV lithography for DRAM applications

Date

2020
Proceedings Paper
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Author(s)

Rispens, Gijsbert  
;
Van Lare, C.
;
Oorschot, D.
;
Hoefnagels, R.
;
Liu, S.
;
Van Mierlo, W.
;
Zuurbier, N.
;
Dardani, Z.
;
Wang, Z.
;
Maslow, M.
;
Finders, J.
;
Fallica, Roberto  
;
Frommhold, Andreas  
;
Hendrickx, Eric  
;
Niroomand, A.
;
Light, S.

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