Browsing by author "Dianat, Golnaz"
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In situ analysis of nucleation reactions during TiCl4/H2O atomic layer deposition on SiO2 and H-terminated Si surfaces treated with a silane small molecule inhibitor
Clerix, Jan-Willem; Dianat, Golnaz; Delabie, Annelies; Parsons, Gregory N. (2023)