Browsing by author "Scheuerer, R."
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Stable thin film encapsulation of acceleration sensors using polycrystalline silicon as sacrificial and encapsulation layer
Hoechst, A.; Scheuerer, R.; Stahl, H.; Fischer, F.; Metzger, L.; Reichenbach, R.; Laermer, F.; Kronmueller, S.; Watcham, S.; Rusu, Cristina; Witvrouw, Ann; Gunn, R. (2004)