Browsing by author "Voorma, Harm-Jan"

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EUV lithography with the alpha demo tools: status and challenges

Harned, Noreen; Goethals, Mieke; Groeneveld, Rogier; Kuerz, Peter; Lowisch, Martin; Meijer, Henk; Meiling, Hans; Ronse, Kurt; Ryan, Jim; Tittnich, Mike; Voorma, Harm-Jan; Zimmmerman, John; Mickan, Uwe; Lok, Sjoerd (2007)