Browsing by author "Santhanam, Kartik"
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Performance enhancement of PFET planar devices by plasma immersion ion implantation (P3i)
Ortolland, Claude; Horiguchi, Naoto; Kerner, Christoph; Chiarella, Thomas; Eyben, Pierre; Everaert, Jean-Luc; Agua Borniquel, Jose; Poon, Tse; Santhanam, Kartik; Porshnev, Peter; Foad, Majeed; Schreutelkamp, Robert; Absil, Philippe; Vandervorst, Wilfried; Felch, Susan; Hoffmann, Thomas Y. (2008)