Browsing by author "Haider, A."
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Failure mechanisms of PVD Ta and ALD TaN barrier layers for Cu contact applications
Zhao, Chao; Tokei, Zsolt; Haider, A.; Demuynck, Steven (2007) -
Scaling of the Cu(Al) seed layer thickness and its impact on the specific resistivity of sub-100 nm lines
Carbonell, Laure; Volders, Henny; Haider, A.; Heylen, Nancy; Richard, Olivier; Palmans, Roger; Travaly, Youssef; Tokei, Zsolt; Boelen, Pieter; Rosenfeld, A.; Mandrekar, T.; Hernandez, Jose Luis; Vanhaelemeersch, Serge (2007)