Publication:
Scaling of the Cu(Al) seed layer thickness and its impact on the specific resistivity of sub-100 nm lines
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1988 since deposited on 2021-10-16
2last month
Acq. date: 2026-04-06
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Statistics
Views
1988 since deposited on 2021-10-16
2last month
Acq. date: 2026-04-06
Citations