Authors

Carbonell, Laure; Volders, Henny; Haider, A.; Heylen, Nancy; Richard, Olivier; Palmans, Roger; Travaly, Youssef; Tokei, Zsolt; Boelen, Pieter; Rosenfeld, A.; Mandrekar, T.; Hernandez, Jose Luis; Vanhaelemeersch, Serge

Conference

Advanced Metallization Conference: 17th Asian Session - ADMETA

Title

Scaling of the Cu(Al) seed layer thickness and its impact on the specific resistivity of sub-100 nm lines

Publication type

Oral presentation