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Scaling of the Cu(Al) seed layer thickness and its impact on the specific resistivity of sub-100 nm lines
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1986 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-09
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Metrics
Views
1986 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-09
Citations