Browsing by author "Danila, Andrey"
Now showing items 1-2 of 2
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TaN etch mechanisms in BCl3-based plasmas
Shamiryan, Denis; Danila, Andrey; Paraschiv, Vasile; Baklanov, Mikhaïl; Boullart, Werner (2008) -
TaN metal gate etch mechanisms in BCl3-based plasmas
Shamiryan, Denis; Danila, Andrey; Baklanov, Mikhaïl; Boullart, Werner (2010)